View source for Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinano35

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== The Sinano3.5 recipe ==
<!-- revised 1/6-2015 by jmli -->
{| border="2" cellpadding="2" cellspacing="1" 
|+ '''Recipe Sinano3.5'''
|-
! rowspan="6" align="center"| Recipe
| Gas
| BCl<sub>3</sub> 5 sccm, HBR 15 sccm
|-
| Pressure
| 5 mTorr, Strike 3 secs @ 5 mTorr
|-
| Power
| 900 W CP, 60 W PP
|- 
| Temperature
| 20 degs
|-
| Hardware
| 100 mm Spacers
|-
| Time
| 120 secs
|-
! rowspan="3" align="center"| Conditions
| Run ID
| 438, 440, ID
|-
| Conditioning
| Sequence: Oxygen clean, MU tests, processes, no oxygen between runs
|-
| Mask
| The [[Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/nanoetch/180nmzep|180 nm zep resist]] etched down to 43 nm
|- 
|}

<gallery caption="The results of the Sinano3.5 recipe" widths="250" heights="200" perrow="3">
image:WF2A-6-feb06-2011-030nm.jpg|The 30 nm trenches
image:WF2A-6-feb06-2011-060nm.jpg|The 60 nm trenches
image:WF2A-6-feb06-2011-090nm.jpg|The 90 nm trenches
image:WF2A-6-feb06-2011-120nm.jpg|The 120 nm trenches
image:WF2A-6-feb06-2011-150nm.jpg|The 150 nm trenches
BCl3 5 sccm, HBr 15 sccm, 5 mTorr, Strike 3 secs @ 5 mTorr, 900 W CP, 60 W PP, 20 degs, 120 secs
</gallery>


{| {{table}}
| align="center" style="background:#f0f0f0;"|'''Nominal trench line width'''
| align="center" style="background:#f0f0f0;"|''''''
| align="center" style="background:#f0f0f0;"|''''''
| align="center" style="background:#f0f0f0;"|'''30'''
| align="center" style="background:#f0f0f0;"|'''60'''
| align="center" style="background:#f0f0f0;"|'''90'''
| align="center" style="background:#f0f0f0;"|'''120'''
| align="center" style="background:#f0f0f0;"|'''150'''
| align="center" style="background:#f0f0f0;"|'''Average'''
| align="center" style="background:#f0f0f0;"|'''Std. dev.'''
|-
| Etch rate||nm/min||||90||109||112||114||117||108||11
|-
| Sidewall angle||degs||||83||81||82||81||80||81||1
|-
| CD loss||nm/edge||||27||47||62||80||97||63||27
|-
| CD loss foot||nm/edge||||27||47||62||80||97||63||27
|-
| Bowing||||||10||14||13||11||13||12||2
|-
| Bottom curvature||||||-24||-18||10||5||5||-4||15
|-
| 
|}