View source for LabAdviser/314/Microscopy 314-307/Technique/X-ray spectroscopy

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[[Category:314]]
[[Category:314-Microscopy]]

= X-ray spectroscopy in electron microscopy =

X-ray spectroscopy can be done in both, scanning electron microscopy (SEM) and transmission electron microscopy (TEM). It can be differentiated between energy dispersive X-ray spectroscopy (EDS or EDX) and wave-length dispersive X-ray spectroscopy (WDS). In both cases, X-rays are generated by the interaction of the probe electrons with matter (idealy the sample). In the case of EDS, the detector consists of a Si-based chip (a so called Silicon drift detector) where the energy of the X-rays is converted into a voltage signal proportinate size. In the case of WDS, X-rays are separated by their wavelength (energy) via diffraction on suitable analyse crystals and detected by their diffraction angle.

EDS is typically suited for fast detection as all X-ray energies are aquired at the same time and therefore is the most applied technique in SEM and TEM. WDS is way slower because each diffraction angle needs to be scanned individually. The advantage is a superior energy resolution and lower detection limit in WDS.

== more detailed information ==


[https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=16&name=20230714_SEM-EDS_Aztec.pdf SEM-EDS with Aztec] ''-requires login''<br />
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*[[LabAdviser/314/Microscopy 314-307/Technique/X-ray_spectroscopy/EDS-SEM|EDS-SEM with Oxford Aztec]] -->

== relevant microscopes ==

*[[LabAdviser/314/Microscopy_314-307/TEM/T12|Tecnai T12 Biotwin]]
*[[LabAdviser/314/Microscopy_314-307/TEM/T20|Tecani T20]]
*[[LabAdviser/314/Microscopy_314-307/TEM/ATEM|Titan ATEM]]
*[[LabAdviser/314/Microscopy_314-307/TEM/ETEM|Titan ETEM]]

*[[LabAdviser/314/SEM/Nova|Nova]]
*[[LabAdviser/314/Microscopy_314-307/SEM/QFEG|QFEG]]
*[[LabAdviser/314/Microscopy_314-307/SEM/AFEG|AFEG]]
*[[LabAdviser/314/Microscopy_314-307/SEM/Helios|Helios Nanolab]]
*[[LabAdviser/314/Microscopy_314-307/SEM/Hydra|Helios Hydra]]

== literature ==

Oxford Instruments information:
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*[https://www.youtube.com/watch?v=MFZ4WiYKLqs EDS Analysis using AZtec: extended demo] -->
*[https://nano.oxinst.com/library/videos Learning page of Oxford Instruments with useful information]
<br>

*[https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=16&name=Oxford_AppNote_SDD_Explained.pdf Application note: SSD explained] ''-requires login''<br />
*[https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=16&name=Oxford_INCAWave.pdf Brochure for thei WDS detector] ''-requires login''<br />

<!-- *[[Media:Oxford_AppNote_SDD_Explained.pdf|Oxford application note: SDD explained]]
*[[Media:Oxford_INCAWave.pdf|Oxford broschure for their WDS detector]] -->