View source for Deposition of SiN with PECVD4/NEW TESTS QC


'''''Unless otherwise stated, this page is written by DTU Nanolab internal (Feb 2025), for more info contact mfarin.'''''

== New QC tests on Silicon nitride - PECVD4 ==


Due to recent instability in the High-Frequency (HF) generator, the thickness deposited during the QC HF Nitride process has not been very reliable. To better control it, new tests were performed. Since the recipe uses 25W of HF, and the main variation was the reflected power—oscillating between ~5W and 10W—higher power levels were tested. When using 100W, the reflected power was significantly more stable. Below, some of the data is presented, comparing 25W and 100W of HF power, as well as results from different characterization tools (Ellipsometer and FilmTek).

=== Data with HF generator=25W ===
[[File:25W - thickness PECVD4 nitride QC.png|left|thumb|435x435px|Data from november to february of 15min QC nitride using 25W. The graph showcases thickness with standard error across time.]]
[[File:25W - Thickness filmtek vs ellipsometer.png|thumb|436x436px|Wafers processed with 25W had the thickness measured in both Filmtek and Ellipsometer, comparing the results.]]









[[File:25W - refractive index QC nitride.png|left|thumb|435x435px|Data from november to february of 15min QC nitride using 25W. The graph showcases the refractive index with standard error across time.]]
[[File:25W - refractive index filmtek vs ellipsometer.png|thumb|436x436px|Wafers processed with 25W had the refractive index measured in both Filmtek and Ellipsometer, comparing the results.]]













[[File:25W - reflected power QC nitride.png|thumb|593x593px|Reflected power of different tests, with 25W as the demanded power.|center]]





=== Data with HF generator=100W ===
[[File:100W - thickness QC nitride.png|left|Data from november to february of 15min QC nitride using 100W. The graph showcases thickness with standard error across time.|thumb|435x435px]]
[[File:100W - thickness ellip vs filmtek.png|thumb|435x435px|Wafers processed with 100W had the thickness measured in both Filmtek and Ellipsometer, comparing the results.]]





[[File:100W - refractive index QC nitride.png|left|thumb|436x436px|Data from november to february of 15min QC nitride using 100W. The graph showcases the refractive index with standard error across time.]]
[[File:100W refractive index ellip vs filmtek.png|thumb|435x435px|Wafers processed with 100W had the refractive index measured in both Filmtek and Ellipsometer, comparing the results.]]

[[File:100W reflected power QC nitride.png|center|thumb|593x593px|Reflected power of different tests, with 100W as the demanded power.]]