View source for Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch/Cr mask

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=SiO2 trench etching with Cr mask=

[[test12]]

{| border="2" cellspacing="2" cellpadding="3" 
!Start parameters, variations noted in the gallery headline
|Recipe name: '''no 10 with lower platen power'''
  
|-
|Coil Power [W]
|2500

|-
|Platen Power [W]
|200

|-
|Platen temperature [<sup>o</sup>C]
|20

|-
|H2 flow [sccm]
|25.6

|-
|C<sub>4</sub>F<sub>8</sub> flow [sccm]
|25.6

|-
|He flow [sccm]
|448.7

|-
|Pressure 
|Fully open APC valve (8-9 mTorr)

|-
|Electromagnetic coils (EM) 'outer coil' / 'inner coil'
|'2 A' / '30 A' (PLEASE DO NOT RUN WITH THESE SETTINGS FOR MORE THAN 6 MIN)

|-
|}

*100 nm Cr mask etched in ICP metal with 500nm DUV neg resist (NUV 2300-0.5) and 65 nm barc.
[[File:C041696Cr_01.jpg|400px|thumb|left|Cr mask before SiO2 etch 800 nm pitch 50% duty cycle. The The Cr linewidth is clearly less than designed]]
<br clear="all" />

==Results==
{| border="2" cellspacing="2" cellpadding="3" 
|'''Temporary conclusions on how the process parameters affect the results in this study:'''
|'''What process parameters affect the results?'''
|- style="vertical-align:top;"
|
*Going from full wafer to small piece on Si carrier: 
**Seemed to give more sidewall passivation
*Platen power: lowering the platen power gives
**more sidewall passivation
**lower etch rate
**Less trenching 
*Removing the H2 gave:
**less sidewall passivation
*Adding O2 gave:
**less sidewall passivation
*Process pressure/total gasflow rate
**Reducing total gasflow rate which reduced the pressur inside the chamber gave:
***less sidewall passivation 
***Reduced the CD (Critical Dimensions)
*Coil power: Reducing coil power 
**less CD loss
**more sidewall passivation
*Increasing process time:
**less sidewall passivation
**more sidewall bow
**CD loss due to larger mask faceting
|
*Sidewall passivation↑
**Sample size↓
**Platen power↓
**Coil power↓
**H2 flow↑
**O2 flow↓
**Total gas flow rate/pressure↑
|-
|}
===Profile SEM images===
{| border="2" cellspacing="2" cellpadding="3" style="width: 100%;" 
!style="width: 20%"|Recipe settings
!style="width: 10%"|Comments
!style="width: 70%"|SEM gallery
|- style="vertical-align:top;"
|
*'''On 6" wafer'''
*Coil Power [W]:2500
*Platen Power [W]: 200
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:25.6
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 25.6
*He flow [sccm]:448.7
*Pressure:Fully open APC valve (8-9 mTorr)
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'2 A' / '30 A' 
*PLEASE DO NOT RUN WITH THESE SETTINGS FOR MORE THAN 6 MIN
|text
|
<gallery caption="SiO2 etch with Cr mask on full wafer 6 min etch" perrow="6" widths="200px" heights="150px">

File:C09721_center_10.jpg
File:C09721_center_18.jpg
File:C09721_center_21.jpg
File:C09721_center_07.jpg
File:C09721_center_05.jpg
File:C09721_center_22.jpg
</gallery>
|- style="vertical-align:top;"
|
*'''Piece on Si carrier'''
*Coil Power [W]:2500
*Platen Power [W]: 200
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:25.6
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 25.6
*He flow [sccm]:448.7
*Pressure:Fully open APC valve (8-9 mTorr)
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'2 A' / '30 A' 
*PLEASE DO NOT RUN WITH THESE SETTINGS FOR MORE THAN 6 MIN
|More sidewall passivation on chip than on full wafer
|
<gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch" perrow="6" widths="200px" heights="150px">

File:C10022_03__06.jpg
File:C10022_03__04.jpg
File:C10022_03__02.jpg
File:C10022_03__08.jpg
File:C10022_03__10.jpg
File:C10022_03__12.jpg
</gallery>
|- style="vertical-align:top;"
|
*Coil Power [W]:2500
*Platen Power [W]: 200
*Platen temperature [<sup>o</sup>C]: 20
*'''H2 flow [sccm]:0'''
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 25.6
*He flow [sccm]:448.7
*Pressure:Fully open APC valve (8-9 mTorr)
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'2 A' / '30 A' 
*PLEASE DO NOT RUN WITH THESE SETTINGS FOR MORE THAN 6 MIN
|Less sidewall passivation from removing the H2
|
<gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch, H2:0sccm" perrow="6" widths="200px" heights="150px">
File:C10025_03__11.jpg
File:C10025_03__09.jpg
File:C10025_03__07.jpg
File:C10025_03__05.jpg
File:C10025_03__03.jpg
File:C10025_03__01.jpg
</gallery>
|- style="vertical-align:top;"
|
*Coil Power [W]:2500
*Platen Power [W]: 200
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:0
*'''O2 flow [sccm]: 5'''
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 25.6
*He flow [sccm]:448.7
*Pressure:Fully open APC valve (8-9 mTorr)
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'2 A' / '30 A' 
*PLEASE DO NOT RUN WITH THESE SETTINGS FOR MORE THAN 6 MIN
|Not a large effect from adding a little O2
|
<gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch, H2:0sccm, O2:5sccm" perrow="6" widths="200px" heights="150px">
File:C10026_03__05.jpg
File:C10026_03__03.jpg
File:C10026_03__01.jpg
File:C10026_03__07.jpg
File:C10026_03__09.jpg
File:C10026_03__10.jpg
</gallery>
|- style="vertical-align:top;"
|
*Coil Power [W]:2500
*Platen Power [W]: 200
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:0
*'''O2 flow [sccm]: 0'''
*'''C<sub>4</sub>F<sub>8</sub> flow [sccm]: 13.0'''
*'''He flow [sccm]:225'''
*Pressure:Fully open APC valve ('''3.35 mTorr''')
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'2 A' / '30 A' 
*PLEASE DO NOT RUN WITH THESE SETTINGS FOR MORE THAN 6 MIN
|Reducing total flow rate and thereby the pressure gives less passivation/redeposition. Sidewall roughness not so bad.
|
<gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch, H2:0sccm, C4F8:13sccm He:225sccm, Pressure:3.35mTorr" perrow="6" widths="200px" heights="150px">
File:C10082_11.jpg
File:C10082_09.jpg
File:C10082_07.jpg
File:C10082_05.jpg
File:C10082_03.jpg
File:C10082_01.jpg
File:C010082top_07.jpg
File:C010082top_03.jpg
File:C010082tilt30_13.jpg
</gallery>
|- style="vertical-align:top;"
|
*'''Coil Power [W]:1200'''
*'''Platen Power [W]: 150'''
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:0
*O2 flow [sccm]: 0
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 13.0
*He flow [sccm]:225
*Pressure:Fully open APC valve (3.35 mTorr)
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'2 A' / '30 A' 
*PLEASE DO NOT RUN WITH THESE SETTINGS FOR MORE THAN 6 MIN
|Reducing the coil power a lot and platen power a little gives more sidewall passivation/redeposition
|
<gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch, H2:0sccm, C4F8:13sccm He:225sccm, Pressure:3.35mTorr; platen power 150W, coil power:1200W" perrow="6" widths="200px" heights="150px">
File:C10084_15.jpg
File:C10084_13.jpg
File:C10084_11.jpg
File:C10084_09.jpg
File:C10084_06.jpg
File:C10084_03.jpg
</gallery>
|- style="vertical-align:top;"
|
*Coil Power [W]:1200
*Platen Power [W]: 150
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:0
*'''O2 flow [sccm]: 10'''
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 13.0
*'''He flow [sccm]:215'''
*Pressure:Fully open APC valve (3.35 mTorr)
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'2 A' / '30 A' 
*PLEASE DO NOT RUN WITH THESE SETTINGS FOR MORE THAN 6 MIN
|Adding oxygen reduces the passivation/redeposition
|
<gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch, H2:0sccm, C4F8:13sccm He:215sccm O2:10sccm, Pressure:3.6mTorr; platen power 150W, coil power:1200W" perrow="6" widths="200px" heights="150px">
File:C10093_03__11.jpg
File:C10093_03__09.jpg
File:C10093_03__07.jpg
File:C10093_03__05.jpg
File:C10093_03__03.jpg
File:C10093_03__01.jpg
</gallery>
|- style="vertical-align:top;"
|
*Coil Power [W]:1200
*Platen Power [W]: 150
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:0
*'''O2 flow [sccm]: 20'''
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 13.0
*'''He flow [sccm]:205'''
*Pressure:Fully open APC valve (3.35 mTorr)
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'2 A' / '30 A' 
*PLEASE DO NOT RUN WITH THESE SETTINGS FOR MORE THAN 6 MIN
|Adding more oxygen reduces further the passivation/redeposition but some trenching appears.
|
<gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch, H2:0sccm, C4F8:13sccm He:205sccm O2:20sccm, Pressure:3.6mTorr; platen power 150W, coil power:1200W" perrow="7" widths="200px" heights="150px">
File:C10101_03__12.jpg
File:C10101_03__10.jpg
File:C10101_03__07.jpg
File:C10101_03__05.jpg
File:C10101_03__03.jpg
File:C10101_03__01.jpg
File:C10101_03__14.jpg
</gallery>
|- style="vertical-align:top;"
|
*'''Coil Power [W]:1800'''
*Platen Power [W]: 150
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:0
*'''O2 flow [sccm]: 10'''
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 13.0
*'''He flow [sccm]:215'''
*Pressure:Fully open APC valve (3.35 mTorr)
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'2 A' / '30 A' 
*PLEASE DO NOT RUN WITH THESE SETTINGS FOR MORE THAN 6 MIN
|Increasing coil power reduces trenching but increases passivation/redeposition
|
<gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch, H2:0sccm, C4F8:13sccm He:215sccm O2:10sccm, Pressure:3.6mTorr; platen power 150W, coil power:1800W" perrow="6" widths="200px" heights="150px">
File:C10102_03__05.jpg
File:C10102_03__03.jpg
File:C10102_03__01.jpg
File:C10102_03__20.jpg
File:C10102_03__18.jpg
File:C10102_03__16.jpg
</gallery>
|- style="vertical-align:top;"
|
*Coil Power [W]:1800
*Platen Power [W]: 150
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:0
*'''O2 flow [sccm]: 20'''
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 13.0
*'''He flow [sccm]:205'''
*Pressure:Fully open APC valve (3.6 mTorr)
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'2 A' / '30 A' 
*PLEASE DO NOT RUN WITH THESE SETTINGS FOR MORE THAN 6 MIN
|Adding more O2 reduces the sidewall passivation/redeposition
|
<gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch, H2:0sccm, C4F8:13sccm He:205sccm O2:20sccm, Pressure:3.6mTorr; platen power 150W, coil power:1800W" perrow="6" widths="200px" heights="150px">
File:C10110_04.jpg
File:C10110_06.jpg
File:C10110_08.jpg |pitch 800 nm <br> Top 461 nm <br> @edge 437 nm <br> bottom 402 nm <br> height 916 nm <br> height from edge 827 nm <br> Cr left 83.5 nm <br> selectivity 55.5
File:C10110_10.jpg |156 nm/min
File:C10110_12.jpg
</gallery>
|- style="vertical-align:top;"
|
*'''Coil Power [W]:1200'''
*'''Platen Power [W]: 100'''
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:0
*O2 flow [sccm]: 20
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 13.0
*He flow [sccm]:205
*Pressure:Fully open APC valve (3.6 mTorr)
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'2 A' / '30 A' 
*PLEASE DO NOT RUN WITH THESE SETTINGS FOR MORE THAN 6 MIN 
|Running with the lower coil power and reducing the platen power also seems to reduced the sidewall passivatin/redeposition, but etch rate goes down 
|
<gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch, H2:0sccm, C4F8:13sccm He:205sccm O2:20sccm, Pressure:3.6mTorr; platen power 100W, coil power:1200W" perrow="7" widths="200px" heights="150px">
File:C10119_01.jpg
File:C10119_03.jpg
File:C10119_05.jpg |pitch 800 nm <br> Top 444 nm <br> bottom 374 nm <br> height 718 nm <br> Cr left 85 nm <br> selectivity 48
File:C10119_06.jpg
File:C10119_09.jpg
File:C10119_11.jpg
</gallery>
|- style="vertical-align:top;"
|
*Coil Power [W]:1200
*Platen Power [W]: 100
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:0
*O2 flow [sccm]: 20
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 13.0
*He flow [sccm]:205
*Pressure:Fully open APC valve (3.6 mTorr)
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'2 A' / '30 A' 
*PLEASE DO NOT RUN WITH THESE SETTINGS FOR MORE THAN 6 MIN 
|Repeating with longer etch time to etch 1500 nm down. Unfortunately this damaged the hardware due to the EM coils getting too hot.  
|
<gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier '''14 min etch''' (PLEASE DO NOT REPEAT THIS LONG TIME), H2:0sccm, C4F8:13sccm He:205sccm O2:20sccm, Pressure:3.6mTorr; platen power 100W, coil power:1200W" perrow="7" widths="200px" heights="150px">
File:C10160_02.jpg
File:C10160_06.jpg
File:C10160_09.jpg
File:C10160_12.jpg
File:C10160_15.jpg
File:C10160_17.jpg
File:Contour Plot Y32 EM_02_30 blue to red.jpg| Etch on none patterned wafer, Uniformity: +- 6.4%
</gallery>
|- style="vertical-align:top;"
|
*'''Coil Power [W]:1800'''
*'''Platen Power [W]: 150'''
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:0
*O2 flow [sccm]: 20
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 13.0
*He flow [sccm]:205
*Pressure:Fully open APC valve (3.6 mTorr)
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'2 A' / '30 A' 
*PLEASE DO NOT RUN WITH THESE SETTINGS FOR MORE THAN 6 MIN 
|Running 1800W/150W at increased time to etch down to 1500 nm. 
|
<gallery caption="C10161 SiO2 etch with Cr mask on wafer piece on Si carrier '''10 min etch''', H2:0sccm, C4F8:13sccm He:205sccm O2:20sccm, Pressure:3.6mTorr; platen power 150W, coil power:1800W" perrow="6" widths="200px" heights="150px">
File:C10161_01.jpg
File:C10161_03.jpg
File:C10161_05.jpg
File:C10161_07.jpg
File:C10161_09.jpg
File:C10161_11.jpg
File:C010161top_01.jpg
File:C010161tilt_04.jpg
</gallery>
|- style="vertical-align:top;"
|
*'''Coil Power [W]:1200'''
*'''Platen Power [W]: 100'''
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:0
*O2 flow [sccm]: 20
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 13.0
*He flow [sccm]:205
*Pressure:Fully open APC valve (3.9 mTorr)
*'''Electromagnetic coils (EM) 'outer coil' / 'inner coil':'0 A' / '0 A'''' 
|Repeating the 1200W/100W recipes at 14 min but without the EM coils. For this recipe the uniformity over the wafer improved from removing the EM coils, so no need for those and now the recipe could run 14 min without damaging the hardware. The profile looked as before. After removing the Cr I looked from the top and with a tilted view and saw the the sidewall roughness was very bad.   
|
<gallery perrow="7" widths="200px" heights="150px" caption="C10184: SiO2 etch with Cr mask on wafer piece on Si carrier 14 min etch, EM:0/0 H2:0sccm, C4F8:13sccm He:205sccm O2:20sccm, Pressure:3.9mTorr; platen power 100W, coil power:1200W">
File:C10184_01.jpg
File:C10184_05.jpg
File:C10184_07.jpg
File:C10184_09.jpg
File:C10184_11.jpg
File:C10184_12.jpg
File:Contour Plot Y33 EM_0_0 blue to red.jpg| Etch on none patterned wafer, Uniformity: +-1.7%
File:C010184top_01.jpg
File:C010184top_04.jpg
File:C010184tilt30plasmaO2_02.jpg| tilt 30 degrees
File:C010184tilt30plasmaO2_01.jpg| tilt 30 degrees
File:C010184tilt20plasmaO2_07.jpg| tilt 20 degrees
File:C010184tilt20plasmaO2_05.jpg| tilt 20 degrees
</gallery>
|- style="vertical-align:top;"
|
*'''Coil Power [W]:2500'''
*Platen Power [W]: 100
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:0
*O2 flow [sccm]: 20
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 13.0
*He flow [sccm]:205
*Pressure:Fully open APC valve (3.9 mTorr)
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'0 A' / '0 A' 
|Tried high coil power and low platen power. This seemed to give som undercutting,especially on the narrow lines. The smallest has been etched away. The etch rate was very low
|
<gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 14 min etch, EM:0/0 H2:0sccm, C4F8:13sccm He:205sccm O2:20sccm, Pressure:3.9mTorr; platen power 100W, coil power:2500W" perrow="7" widths="200px" heights="150px">
File:C10381_04.jpg
File:C10381_06.jpg
File:C10381_07.jpg
File:C10381_30dg_17.jpg
File:C10381_30dg_21.jpg
</gallery>
|- style="vertical-align:top;"
|
*Coil Power [W]:2500
*'''Platen Power [W]: 200'''
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:0
*'''O2 flow [sccm]: 0'''
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 13.0
*He flow [sccm]:225
*Pressure:Fully open APC valve (3.9 mTorr)
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'0 A' / '0 A' 
|Increasing the platen power and and removing the oxygen helped on the under cutting but the lines are still very narrow at the bottom. It also increased the etch rate 
|
<gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 14 min etch, EM:0/0 H2:0sccm, C4F8:13sccm He:225sccm O2:0sccm, Pressure:3.9mTorr; platen power 200W, coil power:2500W" perrow="7" widths="200px" heights="150px">
File:C10393_04.jpg
File:C10393_06.jpg
File:C10393_09.jpg
File:C10393_11.jpg
File:C10393_12.jpg
File:C10393_14.jpg
File:C10393_16.jpg
</gallery>
|- style="vertical-align:top;"
|
*'''14 min'''
*Coil Power [W]:2500
*Platen Power [W]: 200
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:0
*O2 flow [sccm]: 20
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 13.0
*He flow [sccm]:205
*Pressure:Fully open APC valve (3.9 mTorr)
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'0 A' / '0 A' 
|Adding the oxygen again further increased the etch rate and reduced the CD (Critical Dimension) of the Cr mask.
|
<gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 14 min etch, EM:0/0 H2:0sccm, C4F8:13sccm He:205sccm O2:20sccm, Pressure:3.9mTorr; platen power 200W, coil power:2500W" perrow="7" widths="200px" heights="150px">
File:C10399_01.jpg
File:C10399_02.jpg
File:C10399_04.jpg
File:C10399_08.jpg
File:C10399_10.jpg
File:C10399_13.jpg
</gallery>
|- style="vertical-align:top;"
|
*'''Back to start setting without EM coils - 14 min'''
*Coil Power [W]:2500
*Platen Power [W]: 200
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:25.6
*O2 flow [sccm]: 0
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 25.6
*He flow [sccm]:448.7
*Pressure:Fully open APC valve (8-9 mTorr)
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'0 A' / '0 A' 
|I repeated the start setting but without the EM coils. This gives a very none uniform etch over the wafer where in some parts it deposites instead of etching. The profile of 800 nm oitch look fairly good but a closer look reveals the the sidewall is very rough from either redeposition or polymerization. this cannot be removed with a O2 plasma.
|
<gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 14 min etch, EM:0/0" perrow="7" widths="200px" heights="150px">
File:C10576_02.jpg
File:C10576_01.jpg
File:C10576_04.jpg
File:C10576_06.jpg
File:C10576_08.jpg
File:C10576_10.jpg
File:C10576_19.jpg
File:C10576_22.jpg
File:C10576_17.jpg
</gallery>
|- style="vertical-align:top;"
|
*'''Coil Power [W]:600'''
*'''Platen Power [W]: 50'''
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:0
*'''O2 flow [sccm]: 10'''
*'''C<sub>4</sub>F<sub>8</sub> flow [sccm]: 6.5'''
*'''He flow [sccm]:100'''
*Pressure:Fully open APC valve ('''<2 mTorr''')
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'0 A' / '0 A' 
|Due to the large sidewall roughness I decided to try and run at lower powers because it looked at some images like an ionbonbardment effect. First try with 600W/50W. The profile looks fairly good but still with some sidewall roughness. there is also some trenching and the Cr mask looks has a facet all the way down to the SiO2. The is also some bowing. 
|
<gallery caption=" C10751: SiO2 etch with Cr mask on wafer piece on Si carrier 20 min etch, EM:0/0 H2:0sccm, C4F8:6.5sccm He:100sccm O2:10sccm, Pressure:?mTorr; platen power 50W, coil power:600W" perrow="7" widths="200px" heights="150px">
File:C10751_02.jpg
File:C10751_05.jpg
File:C10751_07.jpg
File:C10751_09.jpg
File:C10751_11.jpg
File:C10751_12.jpg
</gallery>
|- style="vertical-align:top;"
|
*'''Coil Power [W]:300'''
*'''Platen Power [W]: 25'''
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:0
*O2 flow [sccm]: 10
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 6.5
*He flow [sccm]:100
*Pressure:Fully open APC valve (<2 mTorr)
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'0 A' / '0 A' 
|Even lower powers: 300W/25W. The profiles looks better with less roughness but also mush slower etch rate, so not as deep as the previous.
|
<gallery caption=" C10752: SiO2 etch with Cr mask on wafer piece on Si carrier 30 min etch, EM:0/0 H2:0sccm, C4F8:6.5sccm He:100sccm O2:10sccm, Pressure:?mTorr; platen power 25W, coil power:300W" perrow="6" widths="200px" heights="150px">
File:C10752_01.jpg
File:C10752_03.jpg
File:C10752_05.jpg
File:C10752_07.jpg
File:C10752_09.jpg
File:C10752_10.jpg
</gallery>
|- style="vertical-align:top;"
|
*'''45 min'''
*Coil Power [W]:300
*Platen Power [W]: 25
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:0
*O2 flow [sccm]: 10
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 6.5
*He flow [sccm]:100
*Pressure:Fully open APC valve (<2 mTorr)
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'0 A' / '0 A' 
|Repeating with longer etch time. Low sidewall roughness, less faceting of the Cr mask. Still some trenching and bowing or negative tapering of the profile. 
|
<gallery caption=" C10834: SiO2 etch with Cr mask on wafer piece on Si carrier 45 min etch, EM:0/0 H2:0sccm, C4F8:6.5sccm He:100sccm O2:10sccm, Pressure:?mTorr; platen power 25W, coil power:300W" perrow="6" widths="200px" heights="150px">
File:C10834_12.jpg
File:C10834_10.jpg
File:C10834_08.jpg
File:C10834_06.jpg
File:C10834_02.jpg
File:C10834_04.jpg
File:C10834T_17.jpg
File:C10834T_15.jpg
File:C10834T_20.jpg
File:C10834T_19.jpg
File:C10834T_21.jpg
File:C10834T_22.jpg
</gallery>
|- style="vertical-align:top;"
|
*Coil Power [W]:300
*'''Platen Power [W]: 20'''
*Platen temperature [<sup>o</sup>C]: 20
*H2 flow [sccm]:0
*O2 flow [sccm]: 10
*C<sub>4</sub>F<sub>8</sub> flow [sccm]: 6.5
*He flow [sccm]:100
*Pressure:Fully open APC valve (<2 mTorr)
*Electromagnetic coils (EM) 'outer coil' / 'inner coil':'0 A' / '0 A' 
|Decreased the platen power a little to see if this could remove the trenching. Not much different from the last.
|
<gallery caption=" C10844: SiO2 etch with Cr mask on wafer piece on Si carrier 50 min etch, EM:0/0 H2:0sccm, C4F8:6.5sccm He:100sccm O2:10sccm, Pressure:?mTorr; platen power 20W, coil power:300W" perrow="6" widths="200px" heights="150px">
File:C10844_02.jpg
File:C10844_05.jpg
File:C10844_09.jpg
File:C10844_07.jpg
File:C10844_11.jpg
File:C10844_13.jpg
</gallery>
|}

TEST:
[[File:C12332_06.jpg|400px]]