View source for LabAdviser/Courses/TPT Thin Film

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==Thin Film TPT ==

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques. 

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards). 

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!colspan="2"|Thin film tool package training (TPT)
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!Schedule
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===<b>Theoretical part</b>===


'''1<sup>st</sup> lecture (2 - 2½ hours):'''
*Introduction to thin films
*Before you start - Material properties to consider
*Overview of thin film techniques at DTU Nanolab
*Equipment overview in LabAdviser
*Thin film techniques – 1<sup>st</sup> part:
**Thermal oxidation 

<i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e. 

The next lecture will be held on the 13th of June 2023 from 10:00 to 12:00.

Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>

<!--The next lecture will be held on the 14th of June 2022 from 10:00 to 12:30.--> 

<!-- If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.-->

'''2<sup>nd</sup> lecture (3 - 3½ hours):'''
*Thin film techniques – 2<sup>nd</sup>  part:
**PVD (physical vapour deposition)
***E-beam evaporation
***Thermal evaporation
***Sputtering
**CVD (chemical vapour depostion)
***LPCVD (low pressure chemical vapour deposition)
***PECVD (plasma enhanced chemical vapour deposition)
**ALD (atomic layer deposition)

<i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf

The next lecture will be held on the 15th of June from 9:00 to 12:00. 

Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>

<!-- If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.-->


===<b>Practical part</b>===
* None
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!Location
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'''Theoretical part'''
* The location of the lectures will be notified in the doodles

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!Qualified prerequisites
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* None
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!Preparations
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* Read [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes] (Available online from DTU campus).
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!Course responsible
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*The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
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!Learning goals
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*Be aware of relevant material properties for thin films made in the cleanroom
*Understand different thin film techniques 
*Compare and be able to select appropriate thin film technique 

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===Material for preparations and further information===




====Slides from the lectures====

<big>Slides from lecture 1</big>
*Lecture slide show [[Media:1_DTU_Nanolab_Thin_Film_TPT_final_April_2023.pptx]]

<big>Slides from lecture 2</big>
*Lecture slide show [[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2023.pptx]]


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====Literature====


*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch7/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films]
*[https://www.sciencedirect.com/science/article/pii/B9780815520375000101 D. M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties]
*[https://link.springer.com/content/pdf/10.1007%2F978-3-662-05179-5.pdf  K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films]

======Thermal Oxidation======
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation]

======Stress in Thin Films======
*[https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects]
*[https://www.bruker.com/fileadmin/user_upload/8-PDF-Docs/SurfaceAnalysis/StylusProfilometry/ApplicationNotes/AN516-Thin_Film_Stress_Measurement_Using_Dektak_Stylus_P.pdf Dektak stress measurements]