View source for Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Slow etch

=The slow etch= 
'''''This work is done by Berit Herstrøm @DTU Nanolab, is nothing else is stated''''' <br>
The slow etch is designed to etch slow at low powers to etch thin films and to avoid overheating of samples mounted on a carrier with Capton/polyimide tape

{| border="2" cellspacing="2" cellpadding="3" 
!Parameter
|Recipe name: '''Slow Etch'''
|Recipe name: '''Slow Etch2'''
  
|-
|Coil Power [W]
|350
|200

|-
|Platen Power [W]
|25
|50

|-
|Platen temperature [<sup>o</sup>C]
|20
|20

|-
|H2 flow [sccm]
|15
|15

|-
|CF<sub>4</sub> flow [sccm]
|30
|30

|-
|Pressure [mTorr]
|3
|10

|-
|}

{| border="2" cellspacing="2" cellpadding="3"
!Typical results
!'''Slow Etch'''
!'''Slow Etch2'''

|-
|Etch of SRN
|'''~43nm/min [measured 39-50 nm/min over a 6" wafer]
|'''23-25 nm/min [4" on carrier]]

|-
|Etch rate of Si3N4
|'''~49 nm/min [4" on carrier]
|'''24-26 nm/min [4" on carrier]

|-
|Etch rate of SiO2
|'''~42nm/min [41-43 nm/min over a 6" wafer]
|'''13.7-14.7 nm/min [4" on carrier]

|-
|Etch rate in Si
|'''ñm/min
|'''11-13 nm/min (10% load, 4" wafer on 6" carrier)
|-
|Etch rate of Mir resist
|'''~nm/min 
|'''~17 nm/min

|-
|Tested etch time without burning the resist
|3 min
|30 min
|-
|Profile [<sup>o</sup>]
|
|
|-
|}

==Etch Profile SEM images==
<gallery caption="Profile of etch for 'Slow Etch2' 12 min" widths="300px done by bghe, DTU Nanolab" heights="300px" perrow="2">
File:C08507_01.jpg
File:C08507_02.jpg
File:C08507_04.jpg
</gallery>


==Etch Uniformity maps==
<br clear="all" />
<gallery caption="Map of etch rate measurements for 'Slow Etch'" widths="300px" heights="300px" perrow="2">
File:contour plot for etchrate of slow etch in SiO2.JPG| Etch rate map of SiO2 etch on 6" wafer
File:contour plot for etchrate of slow etch in SRN.JPG| Etch rate map of SRN etch on 6" wafer
</gallery>

<gallery caption="Map of etch rate measurements for 'Slow Etch2'" widths="300px" heights="300px" perrow="2">

File:Contour Plot etch rates Si3N4.jpg| Etch rate map of Si3N4 etch on 4" wafer (on 6" carrier)
File:Contour Plot etch rates SRN.jpg| Etch rate map of SRN etch on 4" wafer (on 6" carrier)
File:Contour Plot etch rates SiO2.jpg|Etch rate map of SiO2 etch on 4" wafer (on 6" carrier)
File:Contour Plot etch rates Si.jpg|Etch rate map of Si etch on 4" wafer (on 6" carrier)
</gallery>