View source for Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM0.5kWv2.3


The DREM 0.5kW v2.3 recipe is in the standard recipe folder. 

{{Template:Peg1RecipeTableVerCColors
|TableHeader=DREM 0.5 kW v2.3
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{{Template:Peg1RecipeTableVerCAddrowColors
|RecipeName=DREM 0.5kW v2.3
|PriorProcessSteps=  Clamp Substrate,Pump to base, home platen matching unit, barc1, stab
|Keywords= 
|PlatenPosition=U           |PlatenFrequency=HF          |StabilisationTime=          |StartCycleEndCycle=D/E
|DepositionTime=3           |EtchTime='''2.5'''                  |NumberOfCycles= 
|PressureDepDelay=          |PressureDepBoost=           |PressureDepMain=100%
|PressureEtchDelay=         |PressureEtchBoost=          |PressureEtchMain=100%
|C4F8DepDelay=0.3@5         |C4F8DepBoost= 0.5@10        |C4F8DepMain=45
|C4F8EtchDelay=0.3@25       |C4F8EtchBoost=              |C4F8EtchMain=5
|SF6DepDelay=0.3@20         |SF6DepBoost=0.5@10          |SF6DepMain=10
|SF6EtchDelay=1.9@20        |SF6EtchBoost=0.5@30         |SF6EtchMain=30
|O2Dep=                     |O2Etch=                     |ArDep=75                         |ArEtch=1.5@75,75
|WCoilDep=0.5               |WCoilEtch=0.5               |WPlatenDep=1 
|WPlatenEtchDelay=0.9@1     |WPlatenEtchBoost=1@40       |WPlatenEtchMain=1
|WClaritasDep=              |WClaritasEtch=       
|%CoilDepLoad=45            |%CoilDepTune=50             |%CoilEtchLoad=45                  |%CoilEtchTune=50
|%PlatenDepLoad=41          |%PlatenDepTune=60           |%PlatenEtchLoad=41                |%PlatenEtchTune=60
|Temperature=0
|Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE/Pegasus-3/DREM/DREM 0.5kW v2.3 | '''10+''']]
}}
|}