From LabAdviser
(Redirected from Main Page)
Jump to navigation Jump to search
Photos: DTU Nanolab

Unless otherwise stated, this page is written by DTU Nanolab internal

LabAdviser is a wiki accessible for users of the DTU Nanolab facilities. If you are not a current user, please take a look at our homepage. You can also take a virtual tour of the DTU Nanolab cleanroom facility or explore our YouTube channel with a selection of training videos.

LabAdviser contains information about

  • equipment at DTU Nanolab that covers micro and nano fabrication in the cleanroom facility in building 346 and surroundings (in building 346 and 347) and characterization equipment, primarily electron microscopy, at building 314 and 307.
  • fabrication steps in micro and nano fabrication that takes place at the cleanroom fabrication facility and surroundings and
  • electron microscopy methods that takes place at building 314/307.

An overview of the equipment in these facilities can be found and some fabrication process flows and singles fabrication steps are described. In general LabAdviser is meant to advise you to the right equipment and to advise you to a good starting point for your micro and nano fabrication steps as for your electron microscopy work. This should not be replacing communication with the staff of the facilities but we recommend it as a good starting point before contacting the staff. To enter LabAdviser you need to log in with your DTU login. LabAdviser is only editable for the staff of the facilities. If you need further information about certain machinery or processes, please contact the relevant staff. Any feedback or input you might have to LabAdviser is welcome and can be given by mail to the LabAdviser mailbox:

News in LabAdviser:


DTU Nanolab on YouTube [[1]]
Take a virtual tour in the DTU Nanolab cleanroom [[2]]

Overview of micro and nano fabrication steps - a guide to where you can find fabrication information in LabAdviser

All drawings in this section done by Jesper Hanberg @DTU Nanolab

- - -
Clean your sampleJehanClean.png Dry your sample JehanDry.png Create a thin film on your sample Jehanfilm.png Dope your sample JehanDope.png
Thermal treatment of your sample JehanThermal.png Make a mask on your sampleJehanmask.png Transfer pattern to your sample JehanTransfer.png Define your structure directly Jehandefine.jpg
Bond your samples together JehanBond.png Characterize your sample JehanCharacterize.png Pack your sample JehanPack.png Process flow examples Processflow b.png

Contact Information for the DTU Nanolab fabrication part

In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab - Fabrication (formerly known as Danchip).

Mailbox link Concerning
LabAdviser Mailbox Any questions or feedback to LabAdviser.
Process flow review (should work again) More about process flow review here
Training on equipment It is our goal to answer your request regarding process flow reviews and training within 2 workdays.
E-beam training To request training on JEOL JBX-9500FSZ or Raith ELPHY e-beam writer.
Authorization to run JEOL JBX-9500FSZ requires at least 4 training sessions. Before you request for training on this machine, study this page and have all files ready: Getting started.
E-beam load To request cassette loading on JEOL JBX-9500FSZ.
Mask order: Photomasks has to be ordered at Compugraphics in Procure. You can read more about the procedure for mask ordering here. It requires a specification file like this: (example spec file) and a design file (gds or cif format).

Mask Review (Subject: Mask Review) Note: You have to order masks at Compugraphics via Procure.

Nanolab can offer a check of the mask design and specifications. You can read more about mask design here.

Metal wishes . .

Lesker: (Subject: Lesker Metal Wishes). - See current and future materials here: Lesker status log

Temescal/Wordentec: (Subject:PVD Metal Wishes) See current and future materials here:
  • Temescal
  • For Wordentec you need to contact the thin film group.
Tool change Laser: change of optics and
Polymer Injection Molding machine: change mold-tool
Commercial offers etc. mostly companies nanolabexternal customers
Gas-related questions issues (information regarding ordering, delivery, changing etc. Mostly for internal Nanolab use
All other inquiries ... or if you are in doubt

DTU Nanolab Fabrication Cleanroom Naming and Phone Numbers

Cleanroom building 346 ground floor

Drawing: DTU CAS Digital

Room number Where in the room Phone number
A-1 At III-V RIE 55 804
Ax2 At the Lesker 55 815
A-5 In the corner near the furnace/plasma asher 55 803
B-1 In the corridor 55 806
C-1 At the corridor 55 808
D-1 The entrance room 55 703
D-3 At the KOH 55 940
E-1 By the e-beam computers 55 943
E-5/E-4 By the MLAs in E-5, by mask aligner in E-4 55 946
E-6 Furnace 6" 55 948
F-1 III-V growth 55 949
F-2 To the right of the XRD and Ellipsometer 55 941
F-3 DUV Stepper 55 947
Basement 901 Injection molder room in the basement 55 812
Basement 904 To the right of the AFM 55 813

Basement building 346 phase 1

Drawing: DTU CAS Digital

DTU Nanolab building 314 and Phone Numbers

Drawing: DTU CAS Digital

Room number Description Phone number
314-011 QFEG 200 Cryo ESEM 56 406
314-014 Tecnai T20 56 407
314-032 Prep room 1 No phone
314-034 AFEG 250 ESEM 56 414
314-037 Titan ETEM 56 418
314-040 Prep room 2 (Bio) 56 413
314-042 Titan ATEM 56 409
314-060 Nova NanoSEM 600 56 412
314-061 Helios Nanolab 56 411