Specific Process Knowledge/Polymer Processing/Plasma Cleaners
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Plasma cleaner: 2 & 3
Plasma cleaner 2 (located in PolyFaLab) and Plasma cleaner 3 (located in PDMS lab) are Diener Atto (PC control, 13.56 MHz RF) systems installed in 2026. The primary purpose of the plasma cleaners is surface cleaning and activation of polymer films.