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Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/A2 furnace break-down voltage measurement results

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Breakdown voltage results for the A2 Gate Oxide furnace

Dry oxidation

Date Oxidation recipe Oxide thickness Absolute break-down voltage Relative break-down voltage

= Absolute break-down voltage/oxide thickness

February 2022 DRY1050 150 nm
 
 
November 2023 DRY1100 585 nm
 
 
January 2024 DRY1050 226 nm
 

The break-down voltage measurements have been made with help from Kitty Steenberg and Rune Sixten Grass from DTU Health Tech.

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