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Specific Process Knowledge/Lithography/Resist/NILresist

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Imprint Resist Overview

Here is a table with 2 different imprint resists we have recently used in the cleanroom, with links to a purchase manufactor, technical reports about resist properties and a current process flow, tested in our cleanroom.

Resist Manufacturer Comments Technical reports Thinner Spinner Rinse Process flows (in docx-format)
Topas micro resist technology Users may purchase own resist. Topas.pdf LabSpin03 or LabSpin03 IPA
mr-I 7030R micro resist technology We purchase only mr-I 7030R, to use it please contact Lithography. mr-I 7030R.pdf mr-T 1050 LabSpin03 or LabSpin03 Acetone Preparation substrate with mr-I 7030R: Preparation substrate‎ with imprint layer
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