Decommissioned Equipment

List of Decommissioned Equipment

Below is a list of decommissioned equipment that is kept as reference for other Equipment.

Characterization Equipment

• X-Ray Diffractometer
• KLA-Tencor Surfscan 6420

(replaced by Takano WM-7SR)

Lithography Equipment

PlasmaAsher1 PlasmaAsher2

Thin Film Equipment

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Dry Etch Equipment

• RIE (Reactive Ion Etch)

• Si etch using RIE1 or RIE2
• SiO2 etch using RIE1 or RIE2
• Etch of Silicon Nitride using RIE