Specific Process Knowledge/Lithography/EBeamLithography/eLINE
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Process information for the Raith eLINE Plus system
Table of dose to clear
| Dose [µC/cm2]] | AR-P 6200.09 (180 nm)] | PMMA 950k] | AR-N 8200.xx] | |
|---|---|---|---|---|
| Manufactured | 2010 | 2010 | 2010 | |
| Serial | MP0636 | MP0641 | CP0170 | CP0171 |
| Electrode size | 4" | 6" | 6" | 6" |
| Hardware options | ? |