Specific Process Knowledge/Pattern Design/Travka/fields/Tridge

The T-ridge field

The T-ridge fields contain a triple ridge structure for a number of different ridge widths. The triple ridge structure is shown in the image.

Definition of the measures used in the table below

It consists of three ridges of a certain width. The two trenches between them have the same width. The three ridges are separated by an etched area that is five times the ridge width. This parameters of this feature is not changed in the different Travka masks. In order to vary the exposed area on each Travka mask a masked area (in the figure called 'space') is added between every feature.

Travka 05 T-ridge field

Travka 05: T-ridge 2 µm to 6 µm features Width (µm) Triple width (µm) Area (µm) Space (µm) Total feature width (µm) Number of features Total width (µm) 2 10 10 450 480 2 960 3 15 15 675 720 1 1680 4 20 20 900 960 1 2640 5 25 25 1125 1200 1 3840 6 30 30 1350 1440 1 5280

Travka 05: T-ridge 8 µm to 20 µm features Width (µm) Triple width (µm) Area (µm) Space (µm) Total feature width (µm) Number of features Total width (µm) 8 40 40 1800 1920 1 7200 10 50 50 2250 2400 1 9600 15 75 75 3375 3600 1 13200 20 100 100 4500 4800 1 18000

Travka 10 T-ridge field

Travka 10: T-ridge 2 µm to 6 µm features Width (µm) Triple width (µm) Area (µm) Space (µm) Total feature width (µm) Number of features Total width (µm) 2 10 10 210,0 240 3 720 3 15 15 315,0 360 3 1800 4 20 20 420,0 480 3 3240 5 25 25 525,0 600 3 5040 6 30 30 630,0 720 3 7200

Travka 10: T-ridge 8 µm to 20 µm features Width (µm) Triple width (µm) Area (µm) Space (µm) Total feature width (µm) Number of features Total width (µm) 8 40 40 840,0 960 2 9120 10 50 50 1050,0 1200 2 11520 15 75 75 1575,0 1800 2 15120 20 100 100 2100,0 2400 2 19920

Travka 20 T-ridge field

Travka 20: T-ridge 2 µm to 6 µm features Width (µm) Triple width (µm) Area (µm) Space (µm) Total feature width (µm) Number of features Total width (µm) 2 10 10 90,0 120 5 600 3 15 15 135,0 180 6 1680 4 20 20 180,0 240 5 2880 5 25 25 225,0 300 5 4380 6 30 30 270,0 360 5 6180

Travka 20: T-ridge 8 µm to 20 µm features Width (µm) Triple width (µm) Area (µm) Space (µm) Total feature width (µm) Number of features Total width (µm) 8 40 40 360,0 480 5 8580 10 50 50 450,0 600 5 11580 15 75 75 675,0 900 4 15180 20 100 100 900,0 1200 4 19980

Travka 35 T-ridge field

Travka 35: T-ridge 2 µm to 6 µm features Width (µm) Triple width (µm) Area (µm) Space (µm) Total feature width (µm) Number of features Total width (µm) 2 10 10 38,6 68,5 7 480 3 15 15 57,9 102,9 7 1200 4 20 20 77,1 137,1 9 2434 5 25 25 96,4 171,4 8 3805 6 30 30 115,7 205,7 8 5451

Travka 35: T-ridge 8 µm to 20 µm features Width (µm) Triple width (µm) Area (µm) Space (µm) Total feature width (µm) Number of features Total width (µm) 8 40 40 154,3 274,3 8 7646 10 50 50 192,9 342,9 8 10389 15 75 75 289,3 514,3 8 14503 20 100 100 385,7 685,7 8 19989

Travka 50 T-ridge field

Travka 50: T-ridge 2 µm to 6 µm features Width (µm) Triple width (µm) Area (µm) Space (µm) Total feature width (µm) Number of features Total width (µm) 2 10 10 18,0 48 13 624 3 15 15 27,0 72 12 1488 4 20 20 36,0 96 12 2640 5 25 25 45,0 120 12 4080 6 30 30 54,0 144 12 5808

Travka 50: T-ridge 8 µm to 20 µm features Width (µm) Triple width (µm) Area (µm) Space (µm) Total feature width (µm) Number of features Total width (µm) 8 40 40 72,0 192 12 8112 10 50 50 90,0 240 11 10752 15 75 75 135,0 360 11 14712 20 100 100 180,0 480 11 19992

Travka 65 T-ridge field

Travka 65: T-ridge 2 µm to 6 µm features Width (µm) Triple width (µm) Area (µm) Space (µm) Total feature width (µm) Number of features Total width (µm) 2 10 10 6,9 36,9 16 590,8 3 15 15 10,4 55,4 17 1532,3 4 20 20 13,8 73,8 15 2640 5 25 25 17,3 92,3 15 4024,6 6 30 30 20,8 110,8 15 5686,2

Travka 65: T-ridge 8 µm to 20 µm features Width (µm) Triple width (µm) Area (µm) Space (µm) Total feature width (µm) Number of features Total width (µm) 8 40 40 27,7 147,7 15 7901,5 10 50 50 34,6 184,6 15 10670,8 15 75 75 51,9 276,9 15 14824,6 20 100 100 69,2 369,2 14 19993,8

Travka 80 T-ridge field

Travka 80: T-ridge 2 µm to 6 µm features Width (µm) Triple width (µm) Area (µm) Space (µm) Total feature width (µm) Number of features Total width (µm) 2 10 10 0 30 18 540 3 15 15 0 45 20 1440 4 20 20 0 60 18 2520 5 25 25 0 75 18 3870 6 30 30 0 90 18 5490

Travka 80: T-ridge 8 µm to 20 µm features Width (µm) Triple width (µm) Area (µm) Space (µm) Total feature width (µm) Number of features Total width (µm) 8 40 40 0 120 18 7650 10 50 50 0 150 18 10350 15 75 75 0 225 18 14400 20 100 100 0 300 18 19800