Specific Process Knowledge/Characterization

Choose topic

• Sample imaging
• Topographic measurement
• Stress measurement
• Measurement of film thickness and optical constants
• Wafer thickness measurement
• Element analysis
• Hydrophobicity measurement
• Resistivity measurement
• Other electrical measurements

Choose equipment

SEM: Scanning Electron Microscopy

• FEI SEM
• LEO SEM
• JEOL SEM

AFM: Atomic Force Microscopy

• Nanoman - AFM

Profiler

• Dektak 8 stylus profiler
• Tencor stylus profiler

Optical characterization

• Ellipsometer
• Filmtek 4000
• Prism Coupler

SIMS: Secondary Ion Mass Spectrometry

• Atomika SIMS

Thickness Measurer

===Probe station=== writer:Jan