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• 17:18, 5 October 2026 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/ALD2 (PEALD)/TiN plasma deposition using ALD2 (Created page with " <i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br> All images and photos on this page belongs to <b>DTU Nanolab</b>.<br> The fabrication and characterization described below were conducted in <b>2021 by Evgeniy Shkondin, DTU Nanolab</b>.<br></i> Deposition of TiN is a standard, well explored ALD process. In any book where ALD is explained or scientific reviews on a subject, the TiN process is mentioned as a standard example...")