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Specific Process Knowledge/Lithography/Strip/resistStrip

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Resist Strip

Resist strip bench in D-3

In the resist strip it is allowed to strip resist that is deposited on a metal layer. It is not allowed to strip resist with metal on top (lift off). Furthermore no SU-8 is allowed in the bath.

There are one Remover 1165 bath for stripping and one IPA bath for rinsing.

Here are the main rules for resist strip use:

  • Place the wafers in a wafer holder and put them in the first bath for 10 min, this time is depending how much resist you have on the surface.
  • After the strip rinse your wafers in the IPA bath for 2-3 min.
  • Rinse your wafers for 4-5 min. in running water after stripping.


The user manual and contact information can be found in LabManager: Resist Strip - requires login