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Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/E1 furnace break-down voltage measurement results

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Breakdown voltage results for the E1 8" Oxidation furnace

Dry oxidation

Date Oxidation recipe Oxide thickness Absolute break-down voltage Relative break-down voltage

= Absolute break-down voltage/oxide thickness

February 2022 DRY1050 117 nm
November 2023 DRY1100 510 nm
April 2025 DRY1050 115 nm

The break-down voltage measurements have been made with help from Kitty Steenberg and Rune Sixten Grass from DTU Health Tech.

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