Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope

Process optimization using the Picoscope

The Pegasus tools were delivered with a set of standard recipes

• 4 cycles of Process A
• 
  Recorded with the SPTS software
• 
  Recorded with the Picoscope

• 4 cycles of Process D4
• 
  Recorded with the SPTS software
• 
  Recorded with the Picoscope

4 cycles of the recipe PrD4 recorded with the Picoscope

4 cycles of the recipe PrD4 recorded with the SPTS software

4 cycles of the recipe Prcocess A recorded with the Picoscope

4 cycles of the recipe PrD4 recorded with the SPTS software