LabAdviser

LabAdviser is a process handbook for equipment and processes at the DTU Danchip cleanroom facilities. The function and capacity of each piece of equipment is described in detail and general process steps, eg photolithography procedures, are clarified. LabAdviser is meant to advise you to a good starting point for your cleanroom process for further optimization to meet your needs. To enter LabAdviser you need to log in with your DTU login. LabAdviser is only editable for Danchip employees. If you need further information about certain machinery or processes, please contact the Danchip personnel. Any feedback you might have on LabAdviser is welcome and can be given by mail to the LabAdviser mailbox: labadviser@danchip.dtu.dk

News in LabAdviser:
The latest monthly LabAdviser update: LabAdviser update send out 2014-04-11
Slides from the customer meeting December 2013: Customer meeting 2013
Clean room phone numbers: CR phones

Contents

• Danchip contact information
• Introduction to LabAdviser and Processing
• Process flow approval
• Specific Process Knowledge
  • Back-end processing
  • Characterization
  • Etch
  • Imprinting
  • Lithography
  • Thermal process
  • Thin film deposition
  • Wafer and sample drying
  • Wafer Bonding
  • Wafer cleaning
  • Wafer/Substrate Information
  • III-V Processes
• Equipment List
• New equipment in the pipeline and old equipment for decommissioning
• Surveys, statistics, monthly LabAdviser updates and other info.
• How to add information to LabAdviser

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Cleanroom naming and phone numbers

(not fully implemented yet!)

Room number Where in the room Phone number A-1 At III-V RIE 55 804 B-1 In the corridor 55 806 C-1 At the corridor 55 808 D-1 The entrance room 55 703 Ax2 At the Lesker 55 815 A-5 ? 55 803 D-3 At the KOH 55 940 E-1 E-beam 55 943 E-5 Yellow class 10 room 55 946 E-6 Furnace 6" 55 948 F-1 III-V growth 55 949 F-2 Opposite SEM Zeiss 55 941 F-3 DUV Stepper 55 947 SIMS/XPS room in the basement ? 55 813 Injection molder room in the basement ? 55 812