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• 12:28, 14 April 2026 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/mrEBL6000 (content before blanking was: " <br> mrEBL6000 works as a negative e-beam resist but is also UV sensitive, why resist and coated wafers should be kept in yellow rooms only. When carrying the wafers to the e-beam writer, use a black or blue box for protection. While mounting the wafers in the e-beam cassettes, you can turn off the white light in the e-beam room and turn on the yellow light which is located above the pre-aligner setup. Please mount as close to exposure as possible and turn of...")