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• 12:49, 7 April 2026 Bghe talk contribs deleted page Specific Process Knowledge/Characterization/SEM Gemini 1/ma (content before blanking was: "Technical specification Sample requirements Any sample allowed in the cleanroom can be imaged in Gemini 1. If you have any questions, please consult the persons responsible for the SEM. Sample sizes: Up to 8" wafers (the ranges on the X and Y axes only provide full view of a 6" wafer) Vacuum modes: The SEM is usually operated in high vacuum (HV) mode where the chamber pressure is somewhere in the 2*10-4 to 10-6 mbar range. For imaging of non-conducting sa...")