Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using PECVD: Difference between revisions
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=Oxynitrides= | |||
The recipe for making oxynitrides will depend on what kind of oxynitride you need. If you need a little higher refractive index than SiO2 then I would start with an SiO2 recipe and then add NH3 until the right RI is obtained. If you need very high refractive index a little lower than for silicon nitride then it is probably better to start with a silicon nitride recipe and add a some N2O until you get the right refractive index. | The recipe for making oxynitrides will depend on what kind of oxynitride you need. If you need a little higher refractive index than SiO2 then I would start with an SiO2 recipe and then add NH3 until the right RI is obtained. If you need very high refractive index a little lower than for silicon nitride then it is probably better to start with a silicon nitride recipe and add a some N2O until you get the right refractive index. | ||