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Specific Process Knowledge/Thin film deposition/Deposition of Titanium/Ti deposition in Sputter System (Lesker): Difference between revisions

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Created page with "=Ti Sputtering= This page presents the results of Ti deposition using <b>DC sputtering</b> in Sputter-System Lesker, now commonly known as "Old Lesker". The deposition target..."
 
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<gallery caption="XRR analysis of Ti thin film." widths="1500px" heights="500px" perrow="1">
<gallery caption="XRR analysis of Ti thin film." widths="900px" heights="400px" perrow="1">
image:eves_Ti_old_lesker_20W_2021.png| X-ray reflectivity. Measurement and Fit.
image:eves_Ti_old_lesker_20W_2021.png| X-ray reflectivity. Measurement and Fit.
</gallery>
</gallery>
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<gallery caption="XRR analysis of Ti thin film." widths="1500px" heights="500px" perrow="1">
<gallery caption="XRR analysis of Ti thin film." widths="900px" heights="400px" perrow="1">
image:eves_Ti_old_lesker_250W_2021.png| X-ray reflectivity. Measurement and Fit.
image:eves_Ti_old_lesker_250W_2021.png| X-ray reflectivity. Measurement and Fit.
</gallery>
</gallery>