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Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using PECVD: Difference between revisions

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|1470
|1470
|650
|650
|20HF 6s/20LF 2s
|20HF 6s  
20LF 2s
|Low stress nitride - standard recipe
|Low stress nitride - standard recipe
|-
|-
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