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Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system: Difference between revisions

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==Power suppliy configuration==  
==Power suppliy configuration==  


Power supplies specification presented in a table below.
Power supplies specifications presented in a table below.


{| border="2" cellspacing="0" cellpadding="9"  
{| border="2" cellspacing="0" cellpadding="9"