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Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system: Difference between revisions

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<gallery caption="System set-up and power supply configuration." widths="1000px" heights="600px" perrow="1">
<gallery caption="System set-up and power supply configuration." widths="1000px" heights="600px" perrow="1">
image:Kaempe_Lesker_image_overview_main.png| The system set-up showing the different opration modils and power suplies network.<br>HSM-High Strengh Magnet.<br>RGA-Residual Gas Analyser.
image:Kaempe_Lesker_image_overview_main.png| The system set-up showing the different opration modils and power suplies network.<br><b>*HSM</b>-High Strengh Magnet.<br><b>RGA</b> - Residual Gas Analyser.
</gallery>
</gallery>


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