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Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Deposition of Silicon Oxide using LPCVD TEOS: Difference between revisions

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!TEOS gas flow [sccm]
!TEOS gas flow [sccm]
!O<math>_2</math> gas flow [sccm]
!O<math>_2</math> gas flow [sccm]
!PH<math>_3</math> gas flow [sccm]
!TMB
!Comments
!Comments
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