LabAdviser/Technology Research/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications: Difference between revisions
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==Galleries== | ==Galleries== | ||
<gallery caption=" | <gallery caption="" widths="380px" heights="300px" perrow="3"> | ||
image:3D_PhC.png| 3D silicon photonic crystal membranes. | image:3D_PhC.png| 3D silicon photonic crystal membranes. | ||
image:Scallops.png| Comparison of scallops by traditional Bosch process and modified DREM process. | image:Scallops.png| Comparison of scallops by traditional Bosch process and modified DREM process. | ||