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LabAdviser/Technology Research/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications: Difference between revisions

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==Galleries==
==Galleries==


<gallery caption="SEM images of fabricated microstructures and nanostructures" widths="500px" heights="400px" perrow="4">
<gallery caption="SEM images of fabricated microstructures and nanostructures" widths="380px" heights="300px" perrow="3">
image:3D_PhC.png| 3D silicon photonic crystal membranes.  
image:3D_PhC.png| 3D silicon photonic crystal membranes.  
image:AZO_Si_trench_SEM.jpg| AZO trenches in Si host. SEM image, bird-eye-view.
image:3D_PhC.png| 3D silicon photonic crystal membranes.
image:pillars.jpg| AZO pillars. SEM image, bird-eye-view.
image:3D_PhC.png| 3D silicon photonic crystal membranes.
image:tubes.jpg| AZO tubes. SEM image, bird-eye-view.
image:3D_PhC.png| 3D silicon photonic crystal membranes.
image:3D_PhC.png| 3D silicon photonic crystal membranes.
image:3D_PhC.png| 3D silicon photonic crystal membranes.
</gallery>
</gallery>
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