LabAdviser/Technology Research/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications: Difference between revisions
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==Galleries== | ==Galleries== | ||
<gallery caption="SEM images of fabricated microstructures and nanostructures" widths=" | <gallery caption="SEM images of fabricated microstructures and nanostructures" widths="380px" heights="300px" perrow="3"> | ||
image:3D_PhC.png| 3D silicon photonic crystal membranes. | image:3D_PhC.png| 3D silicon photonic crystal membranes. | ||
image: | image:3D_PhC.png| 3D silicon photonic crystal membranes. | ||
image: | image:3D_PhC.png| 3D silicon photonic crystal membranes. | ||
image: | image:3D_PhC.png| 3D silicon photonic crystal membranes. | ||
image:3D_PhC.png| 3D silicon photonic crystal membranes. | |||
image:3D_PhC.png| 3D silicon photonic crystal membranes. | |||
</gallery> | </gallery> | ||