LabAdviser/Technology Research/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications: Difference between revisions
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==Galleries== | ==Galleries== | ||
<gallery caption=" | <gallery caption="SEM images of fabricated microstructures and nanostructures" widths="500px" heights="400px" perrow="4"> | ||
image:3D_PhC.png| 3D silicon photonic crystal membranes | image:3D_PhC.png| 3D silicon photonic crystal membranes. | ||
image:AZO_Si_trench_SEM.jpg| AZO trenches in Si host. SEM image, bird-eye-view. | image:AZO_Si_trench_SEM.jpg| AZO trenches in Si host. SEM image, bird-eye-view. | ||
image:pillars.jpg| AZO pillars. SEM image, bird-eye-view. | image:pillars.jpg| AZO pillars. SEM image, bird-eye-view. | ||