LabAdviser/Technology Research/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications: Difference between revisions
| Line 42: | Line 42: | ||
Advanced Optical Materials (2018) [https://doi.org/10.1002/adom.201801176 DOI] | Advanced Optical Materials (2018) [https://doi.org/10.1002/adom.201801176 DOI] | ||
===Publications as co-author === | |||
'''Inductively coupled plasma nanoetching of atomic layer deposition alumina''' | |||
Han, A., <u>Chang, B.</u>, Todeschini, M., Le, H. T., Tiddi, W., and Keil, M. | |||
Microelectronic Engineering (2018) [https://doi.org/10.1016/j.mee.2018.02.023 DOI] | |||