Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using PECVD: Difference between revisions
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== Deposition of SiN with PECVD4 == | == Deposition of SiN with PECVD4 == | ||
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|bgcolor="#98FB98" |'''Quality Controle (QC) for PECVD4''' | |bgcolor="#98FB98" |'''Quality Controle (QC) for PECVD4 [[Image:section under construction.jpg|70px]] ''' | ||
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