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LabAdviser/Technology Research/Organic Ice Resists for Electron-Beam Lithography - Instrumentation and Processes/SEM-LEO Customizations for Organic Ice Resists: Difference between revisions

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The overall vacuum schematics once all systems are in place is displayed in the image. An external rack houses the temperature, gate valve control and interlock, and the load-lock pump controller. The pumping controller is interfaced with the interlock inside the rack and with the load-lock turbo and roughing pumps which are located under the cleanroom floor, and can control both of them individually.
The overall vacuum schematics once all systems are in place is displayed in the image. An external rack houses the temperature, gate valve control and interlock, and the load-lock pump controller. The pumping controller is interfaced with the interlock inside the rack and with the load-lock turbo and roughing pumps which are located under the cleanroom floor, and can control both of them individually.


Only the load-lock (and, occasionally, a RGA) are permanently installed since they do not affect the SEM chamber volume nor regular operation. Hence, the first step for OIR lithography is to mount the cryosystems and the GIS, and the last step is to unmount them. Instructions regarding the ice lithography setup assembly, operation and control using the rack interfaces is available through training videos.
Only the load-lock (and, occasionally, a RGA) are permanently installed since they do not affect the SEM chamber volume nor regular operation. Hence, the first step for OIR lithography is to mount the cryosystems and the GIS, and the last step is to unmount them.  
 
'''''Instructions regarding the ice lithography setup assembly, operation and control using the rack interfaces is available through training videos.'''''


===For information, contact:===
===For information, contact:===
* [mailto:dizhao@dtu.dk Ding Zhao (PostDoc)]
* [mailto:dizhao@dtu.dk Ding Zhao (PostDoc)]
* [mailto:annaels@dtu.dk Anna Elsukova (PostDoc)]
* [mailto:annaels@dtu.dk Anna Elsukova (PostDoc)]
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