LabAdviser/Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition: Difference between revisions
| Line 26: | Line 26: | ||
Transparent conductive oxides such as Al-doped ZnO (AZO) have attracted significant attention as alternative plasmonic materials, due to their low loss and metallic behavior in the near/mid-infrared range. One more advantage of AZO is the possibility of tuning the permittivity by design, by deciding the dopants or the ratio of different components, thus constituting an advantage over metals having fixed permittivity values. AZO was chosen since the Cu ALD showed up to be far less successful in terms of reproducibility and conformality requirements. AZO has been grown on different substrates in the temperature range 150 <sup>o</sup>C - 250 <sup>o</sup>C and optical, electrical and physical properties have been clarified.<br> | Transparent conductive oxides such as Al-doped ZnO (AZO) have attracted significant attention as alternative plasmonic materials, due to their low loss and metallic behavior in the near/mid-infrared range. One more advantage of AZO is the possibility of tuning the permittivity by design, by deciding the dopants or the ratio of different components, thus constituting an advantage over metals having fixed permittivity values. AZO was chosen since the Cu ALD showed up to be far less successful in terms of reproducibility and conformality requirements. AZO has been grown on different substrates in the temperature range 150 <sup>o</sup>C - 250 <sup>o</sup>C and optical, electrical and physical properties have been clarified.<br> | ||
Finally, | Finally, metamaterials with two different geometries have been realized, AZO trenches and AZO pillars standing in a dielectric host (air or Si). Furthermore, it has been proposed that high aspect ratio grating structures with AZO lamellas in a silicon matrix function as a versatile platform supporting both surface and volume infrared waves. By selective etching of Si the performance of the whole structure | ||
can be reconfigured. In other words, a bi-slab HMM has been suggested, where the effective properties of the structure are controlled by the thickness of the top slab (etching depth).<br clear="all" /> | can be reconfigured. In other words, a bi-slab HMM has been suggested, where the effective properties of the structure are controlled by the thickness of the top slab (etching depth).<br clear="all" /> | ||