Jump to content

LabAdviser/Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition: Difference between revisions

Eves (talk | contribs)
Eves (talk | contribs)
Line 66: Line 66:


*[[/TiO2_Q_plates|Procces flow]]
*[[/TiO2_Q_plates|Procces flow]]


===Fabrication of High Aspect Ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> Nanogratings by Atomic Layer Deposition===
===Fabrication of High Aspect Ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> Nanogratings by Atomic Layer Deposition===