LabAdviser/Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition: Difference between revisions
| Line 66: | Line 66: | ||
*[[/TiO2_Q_plates|Procces flow]] | *[[/TiO2_Q_plates|Procces flow]] | ||
===Fabrication of High Aspect Ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> Nanogratings by Atomic Layer Deposition=== | |||
<u>Shkondin, E.</u>, Takayama, O., Lindhard, J., Larsen, P., Mar, M., Jensen, F. & Lavrinenko, A. | |||
(2016). Fabrication of high aspect ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> nanogratings by atomic layer deposition. Journal of Vacuum Science and Technology A, 34, 031605 (2016) [http://scitation.aip.org/content/avs/journal/jvsta/34/3/10.1116/1.4947586 LINK] | |||
*[[/TIO_ALU_Gratings_Procces_flow|Procces flow]] | |||
===Experimental Demonstration of Effective Medium Approximation Breakdown in Deeply Subwavelength All-Dielectric Multilayers=== | ===Experimental Demonstration of Effective Medium Approximation Breakdown in Deeply Subwavelength All-Dielectric Multilayers=== | ||
| Line 74: | Line 81: | ||
*[[/EMT_Procces_flow|Procces flow]] | *[[/EMT_Procces_flow|Procces flow]] | ||
<!-- This is a comment --> | <!-- This is a comment --> | ||
<!-- This is a comment --> | <!-- This is a comment --> | ||