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LabAdviser/Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition: Difference between revisions

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Finally, HMMs with two different geometries have been realized, AZO trenches and AZO pillars standing in a dielectric host (air or Si). Furthermore, it has been proposed that high aspect ratio grating structures with AZO lamellas in a silicon matrix function as a versatile platform supporting both surface and volume infrared waves. By selective etching of Si the performance of the whole structure
Finally, HMMs with two different geometries have been realized, AZO trenches and AZO pillars standing in a dielectric host (air or Si). Furthermore, it has been proposed that high aspect ratio grating structures with AZO lamellas in a silicon matrix function as a versatile platform supporting both surface and volume infrared waves. By selective etching of Si the performance of the whole structure
can be reconfigured. In other words, a bi-slab HMM has been suggested, where the effective properties of the structure are controlled by the thickness of the top slab (etching depth).<br>
can be reconfigured. In other words, a bi-slab HMM has been suggested, where the effective properties of the structure are controlled by the thickness of the top slab (etching depth).<br clear="all" />


<gallery caption="Al2O3 coatings on Si trenches" widths="500px" heights="500px" perrow="2">
<gallery caption="Fabricated metamaterials based on Al-doped ZnO" widths="500px" heights="500px" perrow="2">
image:AZO_Air_trench_SEM.png| Temperature 150 <sup>o</sup>C, 1000 cycles.
image:AZO_Air_trench_SEM.jpg| AZO trenches in air host.
image:AZO_Si_trench_SEM.png| Temperature 150 <sup>o</sup>C, 1000 cycles.
image:AZO_Si_trench_SEM.jpg| AZO trenches in Si host.
</gallery>
</gallery>
<gallery caption="" widths="500px" heights="500px" perrow="2">
<gallery caption="" widths="500px" heights="500px" perrow="2">
image:pillars.png| Temperature 150 <sup>o</sup>C, 1000 cycles.
image:pillars.jpg| AZO pillars.
image:tubes.png| Temperature 150 <sup>o</sup>C, 1000 cycles.
image:tubes.jpg| AZO tubes.
</gallery>
</gallery>
<br clear="all" />


==Publications==
==Publications==
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