Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/A2 furnace break-down voltage measurement results: Difference between revisions
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<i>The break-down voltage measurements have been made with help from Kitty Steenberg and Rune Sixten Grass from DTU Health Tech.<i> | |||
Latest revision as of 12:51, 16 September 2025
Breakdown voltage results for the A2 Gate Oxide furnace
Dry oxidation
| Date | Oxidation recipe | Oxide thickness | Absolute break-down voltage | Relative break-down voltage
= Absolute break-down voltage/oxide thickness |
| February 2022 | DRY1050 | 150 nm |  |
 |
| November 2023 | DRY1100 | 585 nm |  |
 |
| January 2024 | DRY1050 | 226 nm |  |
The break-down voltage measurements have been made with help from Kitty Steenberg and Rune Sixten Grass from DTU Health Tech.