Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/SiO2 disk and granule source tests in Temescal October 2026: Difference between revisions
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= SiO<sub>2</sub> disk and granule source tests in | = SiO<sub>2</sub> disk and granule source tests in E-Beam Evaporator (10-pockets), October 2026 = | ||
Experimental work and documentation: '''Evgeniy Shkondin, DTU Nanolab'''. Rikke M. Nielsen was present during Run 1 (22 October 2026). Run 2 (23 October 2026) was carried out by Evgeniy Shkondin alone. Report updated on 27 October 2026. | Experimental work and documentation: '''Evgeniy Shkondin, DTU Nanolab'''. Rikke M. Nielsen was present during Run 1 (22 October 2026). Run 2 (23 October 2026) was carried out by Evgeniy Shkondin alone. Report updated on 27 October 2026. | ||