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=Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition=
=Fabrication of Hyperbolic Metamaterials by ALD: AZO Gratings=


The fabrication and characterization described below were conducted in <b>2013-2016 by Evgeniy Shkondin, DTU Nanolab</b>.<br>
The fabrication and characterization described below were conducted in <b>2013-2016 by Evgeniy Shkondin, DTU Nanolab</b>.<br>
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