Specific Process Knowledge/Thin film deposition/Deposition of Tungsten/Sputtering of W in Sputter Coater 3: Difference between revisions
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</gallery> | </gallery> | ||
<gallery caption="XPS scans." widths=" | <gallery caption="XPS scans." widths="400px" heights="350px" perrow="2"> | ||
image:eves_W_sputter_coater_3_big_glass_XPS_Survey_0s_80mA_300s_20220915.png| Survey scan. | image:eves_W_sputter_coater_3_big_glass_XPS_Survey_0s_80mA_300s_20220915.png| Survey scan. | ||
image:eves_W_sputter_coater_3_big_glass_XPS_Survey_20s_80mA_300s_20220915.png| Survey scan after 20s of Ar etch. | image:eves_W_sputter_coater_3_big_glass_XPS_Survey_20s_80mA_300s_20220915.png| Survey scan after 20s of Ar etch. | ||