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LabAdviser/Technology Research/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications: Difference between revisions

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DCH-Employees-701, NLAB-LabmanagerAllUsers
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DCH-Employees-701, NLAB-LabmanagerAllUsers
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image:SiZnO.png| 3D silicon micro-mesh structures integrated with ZnO nanowires for photocatalysis and photocurrent generation.
image:SiZnO.png| 3D silicon micro-mesh structures integrated with ZnO nanowires for photocatalysis and photocurrent generation.
image:SiNanoColor.png| 3D silicon stacked nanowires for structural color generation.
image:SiNanoColor.png| 3D silicon stacked nanowires for structural color generation.
image:3D_PhC.png| 3D silicon photonic crystal membranes.
image:SiMicroPillar.png| High aspect ratio silicon micropillars fabricated with DREM process.
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