LabAdviser/Technology Research/Organic Ice Resists for Electron-Beam Lithography - Instrumentation and Processes/SEM-LEO Customizations for Organic Ice Resists: Difference between revisions

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 ==Gas Injection System==
+[[File:GIS_c_OIR.png|200px|thumb|left|Gas Injection System assembly prepared for an OIR session.]]
+The vapour to condense OIR is introduced in the SEM chamber through a stainless steel nozzle that is connected to the GIS outside the SEM. The GIS consists in a manifold assembly with one UHV leak valve and various HV angle valves, and is connected through a custom flange on the SEM front door. The leak valve is a manual needle valve connecting the GIS body to the inner nozzle and it restricts the injection rate so it can be controlled.
+Glass vials with a HV connection are used to store precursors: larger diameter vials house solid precursors, smaller ones the liquids. A VCR adapter can be used to fit e.g. a gas line instead, for gaseous sources.
 ==Loadlock==
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 ==Practical Stuff==
+[[image:GIS_OIR.png|250px|thumb|Vacuum schematics of the OIR assembly in place.]]
 The overall vacuum schematics once all systems are in place is displayed in the image. An external rack houses the temperature, gate valve control and interlock, and the load-lock pump controller. The pumping controller is interfaced with the interlock inside the rack and with the load-lock turbo and roughing pumps which are located under the cleanroom floor, and can control both of them individually.