LabAdviser/Technology Research/Organic Ice Resists for Electron-Beam Lithography - Instrumentation and Processes/SEM-LEO Customizations for Organic Ice Resists: Difference between revisions
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==Cryogenics== | ==Cryogenics== | ||
The cryogenic elements represent the main additions to the inner SEM chamber. A large cold finger and a cryostage are connected together by a copper braid, and mounted onto the same vacuum flange on the right side of the SEM | The cryogenic elements represent the main additions to the inner SEM chamber. A large cold finger and a cryostage are connected together by a copper braid, and mounted onto the same vacuum flange on the right side of the SEM. The cold finger is mechanically attached to a copper rod feed-through. The external ambient end of the rod stays suspended into a vacuum flask filled with liquid nitrogen on the SEM table. Two hours after immersing the copper rod in liquid nitrogen, the cold finger and cryostage cool to 110 K and 130 K, respectively. The lowest possible temperature of the cryostage is 120 K. | ||
==Practical Stuff== | |||
The overall vacuum schematics once all systems are in place is displayed in the image. An external rack houses the temperature, gate valve control and interlock, and the load-lock pump controller. The pumping controller is interfaced with the interlock inside the rack and with the load-lock turbo and roughing pumps which are located under the cleanroom floor, and can control both of them individually. | |||
Only the load-lock (and, occasionally, a RGA) are permanently installed since they do not affect the SEM chamber volume nor regular operation. Hence, the first step for OIR lithography is to mount the cryosystems and the GIS, and the last step is to unmount them. Instructions regarding the ice lithography setup assembly, operation and control using the rack interfaces is available through training videos. | |||
'''For information, contact:''' | |||
* [mailto:dizhao@dtu.dk Ding Zhao (PostDoc)] | |||
* [mailto:annaels@dtu.dk Anna Elsukova (PostDoc)] | |||