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LabAdviser/Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition/AZO gratings: Difference between revisions

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<gallery caption="" widths="5000px" heights="600px" perrow="1">
<gallery caption="" widths="500px" heights="600px" perrow="1">
image:AZO_trench_fab.jpg| Scheme of fabrication flow. High aspect ratio Al<sub>2</sub>O<sub>3</sub> and TiO<sub>2</sub> nanogratings.
image:AZO_trench_fab.jpg| Scheme of fabrication flow. High aspect ratio Al<sub>2</sub>O<sub>3</sub> and TiO<sub>2</sub> nanogratings.
</gallery>
</gallery>
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