Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using PECVD: Difference between revisions
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==Recipes on PECVD2 for Deposition of Silicon Nitride | ==Recipes on PECVD2 for Deposition of Silicon Nitride== | ||
'''<span style="color:Red">Expired Recipes! The PECVD2 has been decomissioned and is no longer available.</span>''' | '''<span style="color:Red">Expired Recipes! The PECVD2 has been decomissioned and is no longer available.</span>''' | ||
===Recipes=== | ===Recipes=== | ||
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==Recipes on PECVD1 for Deposition of Silicon Nitride | ==Recipes on PECVD1 for Deposition of Silicon Nitride== | ||
'''<span style="color:Red">Expired Recipes! The PECVD1 has been decomissioned and is no longer available.</span>''' | '''<span style="color:Red">Expired Recipes! The PECVD1 has been decomissioned and is no longer available.</span>''' | ||
===Recipes=== | ===Recipes=== | ||
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=Oxynitrides= | =Oxynitrides= | ||
The recipe for making oxynitrides will depend on what kind of oxynitride you need. If you need a little higher refractive index than SiO2 then | The recipe for making oxynitrides will depend on what kind of oxynitride you need. If you need a little higher refractive index than SiO2 then start with an SiO2 recipe and then add NH3 until the right refractive index is obtained. If you need very high refractive index a little lower than for silicon nitride then it is probably better to start with a silicon nitride recipe and add a some N2O until you get the right refractive index. | ||
We had a Ph.d student long time ago Klaus Bo Mogensen that did the first. You can find his ph.d. thesis here: [https://findit.dtu.dk/en/catalog?author=Mogensen&q=title%3A%28Integration+of+Planar+Waveguides+for+Optical+Detection+in+Microfabricated+Analytical+Devices%29 Integration of Planar Waveguides for Optical Detection in Microfabricated Analytical Devices] | We had a Ph.d student long time ago Klaus Bo Mogensen that did the first. You can find his ph.d. thesis here: [https://findit.dtu.dk/en/catalog?author=Mogensen&q=title%3A%28Integration+of+Planar+Waveguides+for+Optical+Detection+in+Microfabricated+Analytical+Devices%29 Integration of Planar Waveguides for Optical Detection in Microfabricated Analytical Devices] | ||
Berit H. has the thesis in her office. | Berit H. has the thesis in her office. | ||