LabAdviser/Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition/AZO gratings: Difference between revisions
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=Fabrication of Hyperbolic Metamaterials | =Fabrication of Hyperbolic Metamaterials by ALD: AZO Gratings= | ||
The fabrication and characterization described below were conducted in <b>2013-2016 by Evgeniy Shkondin, DTU Nanolab</b>.<br> | The fabrication and characterization described below were conducted in <b>2013-2016 by Evgeniy Shkondin, DTU Nanolab</b>.<br> | ||
== Procces flow description == | |||
=====Si template fabrication===== | =====Si template fabrication===== | ||