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Specific Process Knowledge/Etch/Titanium Oxide/ICP metal: Difference between revisions

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===Etching of TiN using ICP metal ===
===Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin, DTU Nanolab===
 
Recipe used: Ti etch <br>
[[image:TiO2_etch_Evgeniy2.jpg|400px]]

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Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin, DTU Nanolab

Recipe used: Ti etch

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