Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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For comparison of the methods for measuring optical constants and film thickness, see here: [[Specific Process Knowledge/Characterization/Measurement of film thickness and optical constants#Film_thickness_and_optical_constants_of_optical_transparent_films|Film thickness and optical constants of optical transparent films]] | For comparison of the methods for measuring optical constants and film thickness, see here: [[Specific Process Knowledge/Characterization/Measurement of film thickness and optical constants#Film_thickness_and_optical_constants_of_optical_transparent_films|Film thickness and optical constants of optical transparent films]] | ||
==Ellipsometer VASE and Ellipsometer M-2000V == | ==Ellipsometer RC2, Ellipsometer M2000XI (VASE) and Ellipsometer M-2000V == | ||
''This section is written by Berit Herstrøm @ DTU Nanolab'' | ''This section is written by Berit Herstrøm @ DTU Nanolab'' | ||
[[image:Ellipsometer_VASE_image.JPG|275x275px|right|thumb|Ellipsometer VASE: positioned in cleanroom C-1, {{photo1}}]] | [[image:Ellipsometer_VASE_image.JPG|275x275px|right|thumb|Ellipsometer VASE: positioned in cleanroom C-1, {{photo1}}]] | ||